TAYLOR HOBSON LTD – MEASUREMENT

Solution: Modular panel
Used as: CEMMNT Centre of Excellence in Metrology
Sector: Electronics & Micro-technologies

  • UK Centre of Excellence in Metrology for Micro and Nano Technologies (CEMMNT)
  • Provides open access measurement support, problem solving, training and advice to British manufacturing and research companies
  • The ISO Class 4 and 7 cleanroom facility is equipped with the latest metrology instrumentation for micro and nanotechnologies
  • Close control cleanroom with a full high pressure gel grid HEPA filter ceiling, raised perforated floors and double walls to ensure continuous air circulation

Technical Specification

The 125m2 modular panel cleanroom facility has been designed and installed to ISO Class 4 standards. Continuous, uninterrupted air circulation is essential to reach ISO Class 4 classification. To achieve this classification the facility has been installed with a high pressure plenum system with a full gel grid HEPA filter ceiling, double skinned walls and a raised floor with perforated floor panels.

Sound and vibration isolation is required, due to the sensitivity of the process equipment and the works carried out within it. The solutions included – all equipment has been positioned on concrete plinths, all the air handling plant has been installed on AV-mounts to reduce vibration around the facility and the air system attenuators have been carefully selected.

The ISO Class 4 and 7 cleanroom facility is equipped with the latest metrology instrumentation for micro and nanotechnologies, including 3D optical profilometry with sub Angstrom resolution, large aperture phase stepping interferometer for large optical components, spectrophotometry for analysis of thin films and optical properties, stylus profilometry with nanometre resolution over a 200 mm traverse and roundness & cylindrical geometry measurement and 3D mapping.