WARWICK UNIVERSITY

Solution: Modular panel
Used as: Research Cleanroom
Sector: Semiconductor
Value: £ 400.000
Duration: 7 months

  • Used for the development of Silicon Carbide (SiC) semiconductor devices for power generation and power conversion applications
  • Traditional / in-situ ISO Class 6 cleanroom facility with a yellow room for photolithography and a suite of processing equipment
  • Extensive gas, water and electronic services to support a wide range of specialist semiconductor equipment
  • Dedicated service corridor, housing an indoor Air Handling Unit (AHU), compressors, ring mains and equipment support systems

Technical Specification

The semiconductor facility at the University of Warwick is used for the development of Silicon Carbide (SiC) semiconductor devices for power generation and power conversion applications. Clean Modules provided a full turnkey solution. Besides the design, installation, commissioning and validation, Clean Modules also installed the extensive services systems, such as nine separate gas and compressed air systems, a DI water system, a chilled water system and relevant ring mains. Positioning and hook-up of the specialist process equipment to the diverse services was also provided by Clean Modules.

The specialised ISO Class 6 humidity controlled cleanroom facility includes a yellow room for photolithography, capable of one micron lithography, and a suite of processing equipment. The facilities provide for research into the materials physics and device fabrication technology of Silicon Carbide (SiC). It also functions as an incubator unit for development of new device concepts and prototype devices for the power electronics systems community, both academic and industry. The cleanroom facility is supported by a dedicated services corridor, housing an indoor AHU, compressors, ring mains and process equipment support systems, such as pumps and chillers. Due to height restrictions, the air is distributed into the rooms via a pressurised plenum ceiling system, with Fan Filter Units.